Analysis of reliability characteristics of high capacitance density MIM capacitors with SiO2–HfO2–SiO2 dielectrics - Concepedia

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Analysis of reliability characteristics of high capacitance density MIM capacitors with SiO2–HfO2–SiO2 dielectrics

19

Citations

7

References

2010

Year

Sang-Uk Park, Chang-Yong Kang, Hyuk-Min Kwon, Byung-Seok Park, Won‐Ho Choi, In‐Shik Han, G. Bersuker, Raj Jammy, Hi‐Deok Lee

Microelectronic Engineering

Electrical EngineeringEngineeringSio2–hfo2–sio2 DielectricsReliability CharacteristicsDevice ReliabilityMicroelectronics

References

	Year	Citations

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