Comparison of structure and mechanical properties of SiO2-like films deposited in O2/HMDSO pulsed and continuous plasmas

The tension of metallic films deposited by electrolysis

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Elastic modulus, indentation pressure and fracture toughness of hybrid coatings on glass

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Micro-scratch analysis and mechanical properties of plasma-deposited silicon-based coatings on polymer substrates

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Natural Sciences, Materials Engineering, Materials Science +17

Diagnostics in helicon plasmas for deposition

A. Granier, F. Nicolazo, C. Vallée et al. · Plasma Sources Science and Technology · 1997 · 96 citations

Natural Sciences, Materials Science, Physics +14