Concepedia

F. Nicolazo

FN

3

Publications

156

Citations

3

H-Index

1997

Active since

Affiliations

Centre National de la Recherche Scientifique(Current)

Nantes Université

F. Nicolazo is an author at Centre National de la Recherche Scientifique specializing in surface science, applied physics, and engineering.

Top concepts

Publications per year

1997–1998

3

Publications

3

Diagnostics in helicon plasmas for deposition

A. Granier, F. Nicolazo, C. Vallée et al. · Plasma Sources Science and Technology · 1997 · 95 citations

, , +15

In situ ellipsometry and infrared analysis of PECVD SiO2 films deposited in an O2/TEOS helicon reactor

C. Vallée, A. Goullet, F. Nicolazo et al. · Journal of Non-Crystalline Solids · 1997 · 32 citations

, , +10

Study of oxygen/TEOS plasmas and thin SiOx films obtained in an helicon diffusion reactor

F. Nicolazo, A. Goullet, A. Granier et al. · Surface and Coatings Technology · 1998 · 29 citations

, , +8

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