Concepedia

Growth of thin transparent titanium nitride layers by reactive laser ablation

V. Crăciun, D. Crǎciun, Corneliu Ghica, Lucian Trupină, Costel Flueraru, N. Nastase

Applied Surface Science · 1999 · 12 citations · 13 references

DOI

Concepts

References

13

Physics of Thin Films

G. Hass, D. Gerstenberg · Journal of The Electrochemical Society · 1964 · 1.8K citations

, , +12

Observation of two distinct components during pulsed laser deposition of high <i>T</i> <i>c</i> superconducting films

T. Venkatesan, X. D. Wu, A. Inam et al. · Applied Physics Letters · 1988 · 365 citations

, , +16

Properties and microelectronic applications of thin films of refractory metal nitrides

M. Wittmer · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1985 · 285 citations

, , +17

The characterization of titanium nitride by x-ray photoelectron spectroscopy and Rutherford backscattering

M. J. Vasile, A. B. Emerson, F. A. Baiocchi · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 114 citations

, , +17

Electrical transport, optical properties, and structure of TiN films synthesized by low-energy ion assisted deposition

N. Savvides, B. Window · Journal of Applied Physics · 1988 · 102 citations

, , +17