GaN on Si Technologies for Power Switching Devices

Abstract

This paper reviews the recent activities for normally-off GaN-based gate injection transistors (GITs) on Si substrates and their application to inverters. Epitaxial growth of the AlGaN/GaN heterostructures with good crystallinity over 200-mm Si substrates with eliminated bowing enables low-cost fabrication of GaN devices with high breakdown voltages. A novel normally-off GaN transistor called as GIT is proposed in which hole injection from the p-type AlGaN gate increases the drain current with low on-state resistance by conductivity modulation. The low on-state resistance in GaN-based devices greatly helps to increase the efficiency of power switching systems. A GaN-based three-phase inverter successfully drives a motor with high efficiency of 99.3% at a high output power of 1500 W. The presented GaN-based devices are expected to greatly help saving energy in the future as an indispensable power switching system.