Characteristics of Fluorocarbon Radicals and CHF₃Molecule in CHF₃Electron Cyclotron Resonance Downstream Plasma

Abstract

The CF, CF 2 and CF 3 radical densities and CHF 3 molecule density were measured in a CHF 3 electron cyclotron resonance (ECR) downstream plasma using infrared diode laser absorption spectroscopy (IRLAS). The intensities of emission lines F * , Ar * and Hα were also measured in a CHF 3 /3 % Ar ECR downstream plasma using optical emission spectroscopy (OES). These measurements were carried out as a function of the microwave power and the pressure with modulation of the power with an on-period of 15 ms and an off-period of 85 ms. On the basis of the results of IRLAS and OES measurements, the behaviors of the radicals in the ECR plasma have been investigated in detail.