Surface damage formation during ion-beam thinning of samples for transmission electron microscopy

Computer simulations of sputtering

J.P. Biersack · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 259 citations

Natural Sciences, Materials Science, Physics +10

Novel scheme for the preparation of transmission electron microscopy specimens with a focused ion beam

M.H.F. Overwijk, F.C. van den Heuvel, C. W. T. Bulle‐Lieuwma · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 258 citations

Engineering, Electrical Engineering, Materials Science +12

SiO 2 film thickness metrology by x-ray photoelectron spectroscopy

Zhaoming Lu, J. P. McCaffrey, B. Brar et al. · Applied Physics Letters · 1997 · 225 citations

Natural Sciences, Materials Engineering, Materials Science +17

Amorphisation and surface morphology development at low-energy ion milling

Á. Barna, B. Pécz, M. Menyhárd · Ultramicroscopy · 1998 · 115 citations

Natural Sciences, Materials Engineering, Materials Science +14

Improved TEM samples of semiconductors prepared by a small‐angle cleavage technique

J. P. McCaffrey · Microscopy Research and Technique · 1993 · 76 citations

Engineering, Materials Engineering, Materials Science +14