Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaphragm

The design, fabrication, and testing of corrugated silicon nitride diaphragms

P.R. Scheeper, Wouter Olthuis, P. Bergveld · Journal of Microelectromechanical Systems · 1994 · 131 citations · Full text

Engineering, Materials Engineering, Materials Science +14

A bidirectional silicon micropump

Roland Zengerle, Stefan Kluge, Martin Richter · 1995 · 90 citations

Engineering, Electrical Engineering, Materials Engineering +12

The fabrication and use of micromachined corrugated silicon diaphragms

J.H. Jerman · Sensors and Actuators A Physical · 1990 · 83 citations

Engineering, Materials Engineering, Materials Science +11

Integrated micro-liquid dosing system

T.S.J. Lammerink, J.H.J. Fluitman · 2002 · 74 citations · Full text

Engineering, Mechanical Engineering, Actuators +16

A Valve-less Planar Pump In Silicon

Anders Olsson, P. Eftoksson, G. Sternme et al. · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 46 citations

Engineering, Electrical Engineering, Microfabrication +6