A study of nickel silicide film as a mechanical material

Mechanical property measurements of thin films using load-deflection of composite rectangular membranes

Osamu Tabata, Ken Kawahata, Susumu Sugiyama et al. · Sensors and Actuators · 1989 · 400 citations

Natural Sciences, Materials Engineering, Materials Science +16

Introduction to microelectronic fabrication

G.W.A.D. · Microelectronics Reliability · 1988 · 232 citations

Engineering, Electrical Engineering, Materials Science +10

Comparison of TiSi2 , CoSi2, and NiSi for Thin‐Film Silicon‐on‐Insulator Applications

J. Chen, J.P. Colinge, Denis Flandre et al. · Journal of The Electrochemical Society · 1997 · 106 citations

Engineering, Electrical Engineering, Materials Science +14

Slab plasmon polaritons and waveguide modes in four-layer resonant semiconductor waveguides

Johan Stiens, R. Vounckx, Irina Veretennicoff et al. · Journal of Applied Physics · 1997 · 106 citations

Engineering, Electrical Engineering, Physics +17

Effect of phosphorus doping on stress in silicon and polycrystalline silicon

S. P. Murarka, T.F. Retajczyk · Journal of Applied Physics · 1983 · 82 citations

Engineering, Materials Engineering, Materials Science +17