Sensors and Actuators B Chemical · 2004 · 133 citations · 13 references
EngineeringBioengineeringBiomedical EngineeringBiomemsMicroelectromechanical SystemsMicrofabricationMems FabricationMicrofabrication ProcessesMicrofluidic Device FabricationMicrofluidic DevicesMicrofluidic SystemsMicrofluidicsMicrofluidic Chip DesignMicrofluidic Device DesignMicrofluidic Fabrication
13