Concepedia

Publication | Closed Access

Buried oxide formation by plasma immersion ion implantation

DOI

25

Citations

5

References

1995

Year

Junhong Min, Paul K. Chu, Yingchun Cheng, J.B. Liu, Seongil Im, Siddharth Iyer, N.W. Cheung
Materials Chemistry and Physics

References

YearCitations

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