Concepedia

Vacuum arc deposition by using a Venetian blind particle filter

Otmar Zimmer

Surface and Coatings Technology · 2005 · 21 citations · 4 references

DOI

Concepts

References

4

On the macroparticle flux from vacuum arc cathode spots

S. Anders, André Anders, K. M. Yu et al. · IEEE Transactions on Plasma Science · 1993 · 115 citations

, , +12

Investigations of forming metal-plasma flows filtered from microparticle fraction in vacuum arc evaporators

A. I. Ryabchikov, I.B. Stepanov · Review of Scientific Instruments · 1998 · 48 citations · Full text

, , +12

Metallization of sub-micron trenches and vias with high aspect ratio

P. Siemroth, C. Wenzel, Wolfgang Klimes et al. · Thin Solid Films · 1997 · 24 citations

, , +11

Characterization of a linear venetian-blind macroparticle filter for cathodic vacuum arcs

Marcela Bilek, André Anders, I.G. Brown · IEEE Transactions on Plasma Science · 1999 · 20 citations

, , +7