The effect of annealing on the structure of cathodic arc deposited amorphous carbon nitride films - Concepedia

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The effect of annealing on the structure of cathodic arc deposited amorphous carbon nitride films

43

Citations

9

References

1996

Year

Dougal G. McCulloch, A.R. Merchant

Thin Solid Films

Materials EngineeringMaterials ScienceAmorphous CarbonEngineeringNanoelectronicsSurface ScienceApplied PhysicsCathodic ArcAmorphous SolidChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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