Properties of carbon nitride films with composition ratio <i>C</i>/<i>N</i>=0.5–3.0 prepared by the ion and vapor deposition method

Kiyoshi Ogata, J.F.D. Chubaci, F. Fujimoto

Journal of Applied Physics

Materials ScienceMaterials EngineeringEngineeringCarbon-based MaterialSurface Science +11

Large-Area and High-Speed Deposition of Microcrystalline Silicon Film by Inductive Coupled Plasma using Internal Low-Inductance Antenna

Eiji Takahashi, Yasuaki Nishigami, Atsushi Tomyo, +7

Japanese Journal of Applied Physics

EngineeringIntegrated CircuitsThin Film Process TechnologySilicon On InsulatorPlasma Processing +14

Coating Films of Titanium Nitride Prepared by Ion and Vapor Deposition Method

Mamoru Satou, Yasunori Andoh, Kiyoshi Ogata, +3

Japanese Journal of Applied Physics

Crystal StructureEngineeringChemical DepositionCorrosionTitanium Nitride Prepared +16

Effects of Antenna Size and Configurations in Large-Area RF Plasma Production with Internal Low-Inductance Antenna Units

Hiroshige Deguchi, Hitoshi Yoneda, Kenji Kato, +6

Japanese Journal of Applied Physics

Plasma DiffusionElectrical EngineeringLia UnitsEngineeringAntenna +8

X-Ray Photoelectron Spectroscopy and Raman Spectroscopy Studies on Thin Carbon Nitride Films Deposited by Reactive RF Magnetron Sputtering

Masao Matsuoka, Sadao Isotani, Ronaldo Domingues Mansano, +5

World Journal of Nano Science and Engineering

EngineeringCubic Boron NitrideGraphite TargetChemistryThin Carbon Nitride +18

Evidence of Ga₂Se₃-Related Compounds on Se-Stabilized GaAs Surfaces

Shinichiro Takatani, A. Nakano, Kiyoshi Ogata, +1

Japanese Journal of Applied Physics

SemiconductorsMaterials ScienceSe AtomsIi-vi SemiconductorEngineering +12

Internal stress in thin films prepared by ion beam and vapor deposition

Naoto Kuratani, Osamu Imai, Akinori Ebe, +2

Surface and Coatings Technology

Materials ScienceIon ImplantationEngineeringApplied PhysicsIon Beam +5

Effect of sputtering-cleaning on adhesion of the metallic films to polymer substrates

Yasushi Fujinami, Hiroaki Hayashi, Akinori Ebe, +2

Materials Chemistry and Physics

Materials ScienceEngineeringMicrofabricationMetallic FilmsSurface Science +5

The synthesis and properties of BN films prepared by ion irradiation and vapor deposition

Satoshi Nishiyama, Naoto Kuratani, Akinori Ebe, +1

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Materials ScienceMaterials EngineeringBoron NitrideEngineeringBn Films +6

Local structure and mean-square relative displacement in SiO₂and GeO₂polymorphs

Akira Yoshiasa, Takuo Tamura, O. Kamishima, +3

Journal of Synchrotron Radiation

Materials ScienceInorganic ChemistryNon-local InteractionEngineeringCrystalline Defects +10