MRS Proceedings · 1991 · 10 citations · 4 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsAmorphous SemiconductorsField-effect TransistorsSemiconductor Device MaterialsSemiconductor Thin FilmsSilicon MaterialsThin-film TransistorsAmorphous Semiconductor FilmsAmorphous SiliconAmorphous Silicon Thin-film TransistorsHydrogenated Amorphous SiliconSilicon Thin Films
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