Properties of amorphous hydrogenated silicon, with special emphasis on preparation by sputtering

Reversible conductivity changes in discharge-produced amorphous Si

D. L. Staebler, C. R. Wroński · Applied Physics Letters · 1977 · 2.9K citations

Natural Sciences, Materials Science, Physics +17

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1974 · 2.3K citations

Natural Sciences, Materials Engineering, Materials Science +17

High Rate Thick Film Growth

John A. Thornton · Annual Review of Materials Science · 1977 · 2.1K citations

Natural Sciences, Materials Engineering, Materials Science +12

Optical Properties of Semiconductors

H. R. Philipp, Hannelore Ehrenreich · Physical Review · 1963 · 2.1K citations

Natural Sciences, Materials Science, Physics +12

Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering

M. H. Brodsky, M. Cardona, J. J. Cuomo · Physical review. B, Solid state · 1977 · 1.6K citations

Natural Sciences, Chemistry, Materials Science +17