FIB failure analysis of memory arrays

<i>Electron Energy-Loss Spectroscopy in the Electron Microscope</i>

R.F. Egerton, Dale E. Newbury · Physics Today · 1987 · 3.4K citations

Natural Sciences, Physics, Analytical Chemistry +11

Failure analysis of 6t sram on low-voltage and high-frequency operation

Shuji Ikeda, Yoshinori Yoshida, Koichiro Ishibashi et al. · IEEE Transactions on Electron Devices · 2003 · 28 citations

Engineering, Computer Engineering, Electrical Engineering +17

A study of formation and failure mechanism of CMP scratch induced defects on ILD in a W-damascene interconnect SRAM cell

Soon‐Moon Jung, Jung-Sup Uom, W.Y. Cho et al. · 2002 · 13 citations

Engineering, Computer Engineering, Electrical Engineering +17

Effects of Ion Species and Energy on the Amorphization of Si During FIB TEM Sample Preparation as Determined by Computational and Experimental Methods

Robert Jamison, A. J. Mardinly, David W. Susnitzky et al. · Microscopy and Microanalysis · 2000 · 13 citations

Engineering, Materials Engineering, Materials Science +16

Focused Ion Beam (FIB) Milling Damage Formed During Tem Sample Preparation of Silicon

David W Susnitzky, Kevin D. Johnson · Microscopy and Microanalysis · 1998 · 13 citations

Engineering, Materials Engineering, Materials Science +16