Interface-engineered EUV multilayer mirrors

High-resolution electron microscopy study of x-ray multilayer structures

A. K. Petford‐Long, Mary Beth Stearns, Chung‐ke Chang et al. · Journal of Applied Physics · 1987 · 198 citations

Natural Sciences, Materials Engineering, Materials Science +17

Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers

S. Bajt, D. G. Stearns, Patrick A. Kearney · Journal of Applied Physics · 2001 · 147 citations

Natural Sciences, Materials Engineering, Materials Science +17

Mo/Si Multilayers with Different Barrier Layers for Applications as Extreme Ultraviolet Mirrors

Stefan Braun, Hermann Mai, Matthew Moss et al. · Japanese Journal of Applied Physics · 2002 · 145 citations

Natural Sciences, Materials Engineering, Materials Science +17

Interlayer transition zones in Mo/Si superlattices

S. A. Yulin, Torsten Feigl, Thomas Kuhlmann et al. · Journal of Applied Physics · 2002 · 91 citations

Natural Sciences, Materials Science, Physics +17

Interface imperfections in metal/Si multilayers

David L. Windt, R. Hull, W. K. Waskiewicz · Journal of Applied Physics · 1992 · 62 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17