Sergiy Yulin

Publications

410

Citations

H-Index

2002

Active since

Affiliations

Fraunhofer Institute for Applied Optics and Precision Engineering(Current)

Friedrich Schiller University Jena

Sergiy Yulin is an author at Fraunhofer Institute for Applied Optics and Precision Engineering specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceOptical MaterialsOptical PropertiesSurface SciencePhysicsOptoelectronicsGraded-reflectivity MirrorsThin Films

Publications per year

2002–2021

Publications

EUV multilayer optics

Torsten Feigl, Sergiy Yulin, Nicolas Benoît et al. · Microelectronic Engineering · 2006 · 56 citations

Photonics, Optical Materials, Engineering +7

Interface-engineered EUV multilayer mirrors

Sergiy Yulin, Nicolas Benoît, Torsten Feigl et al. · Microelectronic Engineering · 2006 · 49 citations

Wafer Scale Processing, Engineering, Applied Physics +3

Optical properties of unprotected and protected sputtered silver films: Surface morphology vs. UV/VIS reflectance

Paul Johannes Jobst, Olaf Stenzel, Mark Schürmann et al. · Advanced Optical Technologies · 2013 · 39 citations

Optical Materials, Engineering, Optical Coatings +17

Mo/Si multilayers with enhanced TiO 2 - and RuO 2 -capping layers

Sergiy Yulin, Nicolas Benoît, Torsten Feigl et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 25 citations

Optical Materials, Engineering, Optoelectronic Devices +23

Material-specific imaging of nanolayers using extreme ultraviolet coherence tomography

Felix Wiesner, Martin Wünsche, Julius Reinhard et al. · Optica · 2020 · 24 citations · Full text

Engineering, Microscopy, Optical Characterization +21

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