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Investigation of void formation beneath thin AlN layers by decomposition of sapphire substrates for self-separation of thick AlN layers grown by HVPE

Materials EngineeringMaterials ScienceAluminium NitrideSurface CharacterizationEngineeringSapphire SubstratesSurface ScienceApplied PhysicsChemical DepositionSurface ProcessingChemical Vapor DepositionThick Aln Layers