Simultaneous measurement of three orthogonal components of displacement by electronic speckle-pattern interferometry and the Fourier transform method

Abstract

The measurement of three-dimensional displacement by electronic speckle-pattern interferometry with three object beams and one reference beam is presented. Multiple interference fringes corresponding to different sensitivity vectors are recorded in a single interferogram and separated by means of the Fourier transform method to give three components of displacement. The relationship between the ratio of the speckle size to the pixel size of a TV camera and the measurement error is investigated experimentally and compared with the research of others. The optimum condition leading to a minimum measurement error occurs when the speckle size is approximately equal to the pixel size. With this condition satisfied, the measurement error varies from 1.5% to 6.0%.