Relationship of the total integrated scattering from multilayer-coated optics to angle of incidence, polarization, correlation length, and roughness cross-correlation properties

Abstract

Previously published vector equations describing angle-resolved scattering from single-layer- and multilayer-coated optics have been integrated numerically and analytically over all angles in the reflecting hemisphere to obtain numerical results and analytical expressions for total integrated scattering (TIS). The effects of correlation length, polarization, angle of incidence, roughness height distribution, scattered light missed by the collecting hemisphere, and roughness cross-correlation properties of the multilayer stack on the TIS expression are considered. Background material on TIS from optics coated with single opaque reflecting layers is given for completeness and comparison to corresponding multilayer TIS results. It is shown that errors can occur in calculating the true rms surface roughness from actual TIS measurements; ways to correct these errors are discussed.