Uniform groove-depths in (110) Si anisotropic etching by ultrasonic waves and application to accelerometer fabrication - Concepedia

Concepedia

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Uniform groove-depths in (110) Si anisotropic etching by ultrasonic waves and application to accelerometer fabrication

27

Citations

6

References

1995

Year

K. Ohwada, Y. Negoro, Y. Konaka, Takahiro Oguchi

Sensors and Actuators A Physical

Uniform Groove-depthsEngineeringMicrofabricationMechanical EngineeringApplied PhysicsSi AnisotropicUltrasonic WavesUltrasoundInstrumentationMicroelectronicsPlasma EtchingSilicon On InsulatorMicromachined Ultrasonic Transducer

References

	Year	Citations

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