Concepedia

Y. Konaka

YK

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Publications

3

Citations

60

H-Index

3

Active since

1995

Affiliations

Murata (Japan)(Current)

Y. Konaka is an author at Murata (Japan) specializing in sensors, engineering, and microelectromechanical sensors.

Publications per year

1995–2005

3

Publications

3

Uniform groove-depths in (110) Si anisotropic etching by ultrasonic waves and application to accelerometer fabrication

K. Ohwada, Y. Negoro, Y. Konaka et al. · Sensors and Actuators A Physical · 1995 · 27 citations

, , +15

Groove depth uniformization in [110] Si anisotropic etching by ultrasonic wave and application to accelerometer fabrication

K. Ohwada, Y. Negoro, Y. Konaka et al. · 2005 · 21 citations

, , +17

Single- and multi-layer electroplated microaccelerometers

Y. Konaka, Mark G. Allen · 2002 · 12 citations

, , +17

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