Microelectronic Engineering · 1997 · 40 citations · 2 references
EngineeringManufacturing EngineeringMaterials ScienceMicrofabricationNanomaterialsNanotechnologyElectron Beam LithographyNanoscale MaterialsNanostructured SurfacesSoft LithographySurface MorphologySurface TexturingEmbossingNano-texturingNanostructured Surface Features
2
Steef F. Steeneken, Anita G. J. Buma, W.W.C. Gieskes · Photochemistry and Photobiology · 1995 · 28 citations
Natural Sciences, Materials Engineering, Materials Science +13