Microelectronic Engineering · 2013 · 22 citations · 9 references
EngineeringElectrical EngineeringMaterials ScienceMetallic MaterialsMicroelectronicsMicrowave EngineeringIntegrated Circuit DesignInterconnect ArchitectureInterconnect DesignInterconnect TechnologyMillimeter-wave CommunicationsWaveguides3D Integrated CircuitsCopper InterconnectsHigh-density InterconnectsInterconnect FabricationInterconnect Topology DesignThree-dimensional Integrated Circuit InterconnectsThree-dimensional Integration
9