Concepedia

Publication | Closed Access

A study of the process pressure influence in reactive sputtering aiming at hysteresis elimination

DOI

39

Citations

8

References

2013

Year

Erik Särhammar, Koen Strijckmans, Tomas Nyberg, Sigelinde Van Steenberge, S. Berg, Diederik Depla
Surface and Coatings Technology

References

YearCitations

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