Study on d.c. magnetron sputter deposition of titanium aluminium nitride thin films: effect of aluminium content on coating

The microstructure of sputter‐deposited coatings

John A. Thornton · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 1.3K citations

Natural Sciences, Materials Engineering, Materials Science +16

Crystal growth and microstructure of polycrystalline Ti1−xAlxN alloy films deposited by ultra-high-vacuum dual-target magnetron sputtering

U. Wahlström, Lars Hultman, J.‐E. Sundgren et al. · Thin Solid Films · 1993 · 207 citations

Natural Sciences, Materials Engineering, Materials Science +16

Multilayer, multicomponent, and multiphase physical vapor deposition coatings for enhanced performance

William D. Sproul · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 124 citations

Natural Sciences, Materials Engineering, Materials Science +17

Properties of (Ti1−<i>x</i>Al<i>x</i>)N coatings for cutting tools prepared by the cathodic arc ion plating method

Yoshihiro Tanaka, Turgut M. Gür, M. K. Kelly et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 107 citations

Natural Sciences, Materials Engineering, Materials Science +17

The effects of nitrogen flow on reactively sputtered TiAlN films

Bor‐Yuan Shew, Jow-Lay Huang · Surface and Coatings Technology · 1995 · 60 citations

Natural Sciences, Materials Engineering, Materials Science +14