Concepedia

Crystal growth and microstructure of polycrystalline Ti1−xAlxN alloy films deposited by ultra-high-vacuum dual-target magnetron sputtering

U. Wahlström, Lars Hultman, J.‐E. Sundgren, F. Adibi, I. Petrov, J. E. Greene

Thin Solid Films · 1993 · 207 citations · 22 references

DOI

Concepts

References

22

X-Ray Diffraction Procedures for Polycrystalline and Amorphous Materials.

A. L. Patterson · Journal of the American Chemical Society · 1955 · 2.8K citations

, , +11

Material selection for hard coatings

H. Holleck · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 1.2K citations

, , +17

Titanium aluminum nitride films: A new alternative to TiN coatings

Wolf‐Dieter Münz · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 947 citations

, , +17

Oxidation of metastable single-phase polycrystalline Ti0.5Al0.5N films: Kinetics and mechanisms

D.C. McIntyre, J. E. Greene, G. Håkansson et al. · Journal of Applied Physics · 1990 · 536 citations

, , +17

On structure and properties of sputtered Ti and Al based hard compound films

O. Knotek, M. Böhmer, T. Leyendecker · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 397 citations

, , +17