Publication | Closed Access

Microstructure and tribological properties of TiN, TiC and Ti(C, N) thin films prepared by closed-field unbalanced magnetron sputtering ion plating

Materials ScienceMaterials EngineeringEngineeringSurface ScienceApplied PhysicsTribological PropertiesThin FilmsIon PlatingClosed-field Unbalanced MagnetronChemical DepositionChemical Vapor DepositionThin Film ProcessingMicrostructure