Characterisation of TiN coatings and of the TiN/Si interface by X-ray photoelectron spectroscopy and Auger electron spectroscopy - Concepedia

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Characterisation of TiN coatings and of the TiN/Si interface by X-ray photoelectron spectroscopy and Auger electron spectroscopy

195

Citations

15

References

1993

Year

Pierre-Yves Jouan, M. C. Peignon, Christophe Cardinaud, Guy Lempérière

Applied Surface Science

Materials ScienceSurface CharacterizationTin/si InterfaceEngineeringCorrosionSurface AnalysisSurface ScienceApplied PhysicsX-ray Photoelectron SpectroscopyTin CoatingsSurface ProcessingDepth-graded Multilayer Coating

References

	Year	Citations

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