Journal of Lightwave Technology · 1989 · 166 citations · 39 references
EngineeringElectrical EngineeringMaterials ScienceOpticsOptoelectronicsPhotonicsIntegrated OpticsOptical FibersOptical WaveguidesOptoelectronic MaterialsSilicon PhotonicsWaveguidesGlass WaveguidesIntegrated WaveguidesOptical Fiber WaveguidesOptical PackagingRib WaveguidesSilicon WaveguidesWaveguide DesignWaveguide Fabrication
Work on deposited glass waveguides on silicon to form waveguides and filters is reviewed. The choice of these particular waveguides makes sense only as part of a consistent approach to optoelectronic packaging. Hybrid optical packaging on silicon (HOPS) is described and briefly compared with other techniques. For these packages, two waveguides were developed: a tight mode waveguide with a silicon nitride rib core for matching a semiconductor laser and a loose mode waveguide with a phosphosilicate glass core for matching an optical fiber.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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Silicon as a mechanical material
K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations
Anisotropic etching of silicon
K.E. Bean · IEEE Transactions on Electron Devices · 1978 · 796 citations
F.E. Ross · IEEE Communications Magazine · 1986 · 330 citations