Concepedia

Technical note: Design and performance of a movable post-cathode magnetron sputtering system for making PBFA II accelerator ion sources

D.M. Mattox, R. E. Cuthrell, C.R. Peeples, P. L. Dreike

Surface and Coatings Technology · 1987 · 13 citations · 16 references

DOI

Concepts

References

16

UV/ozone cleaning of surfaces

J.R. Vig · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1985 · 684 citations

, , +13

Dynamical parameters of desorbing molecules

G. Comsa, R. David · Surface Science Reports · 1985 · 409 citations

, , +10

Internal stresses in Cr, Mo, Ta, and Pt films deposited by sputtering from a planar magnetron source

David W. Hoffman, John A. Thornton · Journal of Vacuum Science and Technology · 1982 · 256 citations

, , +17

Effect of ion bombardment during deposition on thick metal and ceramic deposits

Robert D. Bland, G. J. Kominiak, D.M. Mattox · Journal of Vacuum Science and Technology · 1974 · 200 citations

, , +16

Modification of evaporated chromium by concurrent ion bombardment

David W. Hoffman, M. R. Gaerttner · Journal of Vacuum Science and Technology · 1980 · 156 citations

, , +15