Microfabrication of miniature aperture at the apex of SiO2 tip on silicon cantilever for near-field scanning optical microscopy

Near-Field Optics: Microscopy, Spectroscopy, and Surface Modification Beyond the Diffraction Limit

Eric Betzig, J. K. Trautman · Science · 1992 · 1.8K citations

Diffraction Limit, Optical Materials, Engineering +27

Near-field magneto-optics and high density data storage

Eric Betzig, J. K. Trautman, R. Wolfe et al. · Applied Physics Letters · 1992 · 755 citations

Magnetic Properties, Optical Materials, Engineering +23

Image formation in near-field optics

Jean‐Jacques Greffet, Rémi Carminati · Progress in Surface Science · 1997 · 340 citations

Photonics, Light Field Imaging, Image Formation +5

Near-field photolithography with a solid immersion lens

Lucien P. Ghislain, Virgil B. Elings, Kenneth B. Crozier et al. · Applied Physics Letters · 1999 · 155 citations

Optical Materials, Engineering, Electron-beam Lithography +21

Generating ∼90 nanometer features using near-field contact-mode photolithography with an elastomeric phase mask

John A. Rogers, Kateri E. Paul, Rebecca J. Jackman et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 120 citations

Optical Materials, Engineering, Electron-beam Lithography +22