Profile measurement using projection of running fringes

Guy Indebetouw

Applied Optics · 1978 · 87 citations · 6 references

Concepts

Abstract

A method of profile control or measurement using projected fringes is presented. The fringes are dynamically translated over the object, and the phase of the signal picked up at a selected point on the surface is used to determine the depth or the depth error of the profile at this point. The method has the advantage of being contact-free, fast, accurate, and easily automated.

References

6