A novel route to a polycrystalline silicon thin-film solar cell

On the Way Towards High Efficiency Thin Film Silicon Solar Cells by the “Micromorph” Concept

J. Meier, P. Torres, R. Platz et al. · MRS Proceedings · 1996 · 248 citations · Full text

Engineering, Electrical Engineering, Materials Science +12

Thin-film poly-Si solar cells on glass substrate fabricated at low temperature

Kenji Yamamoto, Masashi Yoshimi, Y. Tawada et al. · Applied Physics A · 1999 · 189 citations

Engineering, Materials Engineering, Materials Science +16

Ion energetics in electron cyclotron resonance discharges

W. M. Holber, John Forster · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 112 citations

Engineering, Electrical Engineering, Microelectronics +9

Ion-energy effects in silicon ion-beam epitaxy

J. W. Rabalais, A. Al-Bayati, Kevin J. Boyd et al. · Physical review. B, Condensed matter · 1996 · 100 citations

Engineering, Materials Engineering, Materials Science +17

Pilot production of thin-film crystalline silicon on glass modules

Paul A. Basore · 2003 · 57 citations

Natural Sciences, Materials Engineering, Materials Science +17