Refractive index properties of SiN thin films and fabrication of SiN optical waveguide

Silica waveguides on silicon and their application to integrated-optic components

Masao Kawachi · Optical and Quantum Electronics · 1990 · 519 citations

Engineering, Materials Engineering, Materials Science +14

Mechanisms of Plasma‐Enhanced Silicon Nitride Deposition Using SiH4 /  N 2 Mixture

Haiping Dun, Paihung Pan, F. White et al. · Journal of The Electrochemical Society · 1981 · 139 citations

Natural Sciences, Materials Engineering, Materials Science +17

Plasma enhanced chemical vapor deposition silicon oxynitride optimized for application in integrated optics

Kerstin Wörhoff, A. Driessen, P.V. Lambeck et al. · Sensors and Actuators A Physical · 1999 · 125 citations

Natural Sciences, Materials Engineering, Materials Science +14

Infrared study of Si-rich silicon oxide films deposited by plasma-enhanced chemical vapor deposition

A. Sassella, A. Borghesi, Federico Corni et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 92 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Thermal Annealing Effects on the Mechanical Properties of Plasma‐Enhanced Chemical Vapor Deposited Silicon Oxide Films

H.-J. Schliwinski, Uwe Schnakenberg, W. Windbracke et al. · Journal of The Electrochemical Society · 1992 · 61 citations

Natural Sciences, Materials Engineering, Materials Science +17