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Refractive index properties of SiN thin films and fabrication of SiN optical waveguide

Refractive Index PropertiesOptical MaterialsEngineeringOptical PropertiesApplied PhysicsSin Thin FilmsGuided-wave OpticSin Optical WaveguideThin Film Process TechnologyThin FilmsOptoelectronicsPlanar Waveguide SensorDiffractive Optic