Federico Corni

Infrared study of Si-rich silicon oxide films deposited by plasma-enhanced chemical vapor deposition

A. Sassella, A. Borghesi, Federico Corni et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 92 citations · Full text

Engineering, Chemistry, Silicon On Insulator +16

Hydrogen-related complexes as the stressing species in high-fluence, hydrogen-implanted, single-crystal silicon

G. F. Cerofolini, L. Meda, R. Balboni et al. · Physical review. B, Condensed matter · 1992 · 81 citations · Full text

Engineering, Single-crystal Silicon, Silicon On Insulator +17

Formation of vacancy clusters and cavities in He-implanted silicon studied by slow-positron annihilation spectroscopy

R.S. Brusa, Grzegorz P. Karwasz, N. Tiengo et al. · Physical review. B, Condensed matter · 2000 · 71 citations · Full text

Open Volume Defect, Engineering, Positron Annihilation Spectroscopy +17

Helium-implanted silicon: A study of bubble precursors

Federico Corni, G. Calzolari, Stefano Frabboni et al. · Journal of Applied Physics · 1999 · 49 citations · Full text

Engineering, Nuclear Physics, Radiation Materials Science +17

Helium in silicon: Thermal-desorption investigation of bubble precursors

Federico Corni, C. Nobili, G. Ottaviani et al. · Physical review. B, Condensed matter · 1997 · 48 citations · Full text

Materials Science, Thermal Desorption Measurements, Ion Implantation +15