Concepedia

H.-J. Schliwinski

HS

Statistics

Publications

4

Citations

140

H-Index

4

Active since

1990

Affiliations

Fraunhofer Institute for Microengineering and Microsystems(Current)

H.-J. Schliwinski is an author at Fraunhofer Institute for Microengineering and Microsystems specializing in materials science, engineering, and applied physics.

Top concepts

Publications per year

1990–1992

4

Publications

4

Thermal Annealing Effects on the Mechanical Properties of Plasma‐Enhanced Chemical Vapor Deposited Silicon Oxide Films

H.-J. Schliwinski, Uwe Schnakenberg, W. Windbracke et al. · Journal of The Electrochemical Society · 1992 · 61 citations

Disorder in vitreous SiO2: The effect of thermal annealing on structural properties

Peter J. de Lange, Uwe Schnakenberg, S. Ullerich et al. · Journal of Applied Physics · 1990 · 58 citations

, , +17

Diamond membranes for x-ray masks

Bernd Löchel, H.-J. Schliwinski, H.‐L. Huber et al. · Microelectronic Engineering · 1992 · 11 citations

, , +5

Stress modification and characterization of thin SiC films grown by plasma-enhanced chemical vapour deposition

H.-J. Schliwinski, Leandro Buchmann, W. Windbracke et al. · Materials Science and Engineering B · 1992 · 10 citations

, , +8

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