S. Ullerich

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Publications

Citations

130

H-Index

Active since

1990

Affiliations

Fraunhofer Institute for Microelectronic Circuits and Systems(Current)

S. Ullerich is an author at Fraunhofer Institute for Microelectronic Circuits and Systems specializing in engineering, applied physics, and microelectronics.

Top concepts

EngineeringApplied PhysicsMicroelectronicsMicrofabricationMaterials EngineeringMicrofluidicsOphthalmologyBioelectronicsNanotechnologyInstrumentation

Publications per year

1990–2000

Publications

Disorder in vitreous SiO2: The effect of thermal annealing on structural properties

Peter J. de Lange, Uwe Schnakenberg, S. Ullerich et al. · Journal of Applied Physics · 1990 · 58 citations

Engineering, Thermal Oxidation, Silicon On Insulator +17

NH4OH-based etchants for silicon micromachining: Influence of additives and stability of passivation layers

Uwe Schnakenberg, W. Benecke, Bernd Löchel et al. · Sensors and Actuators A Physical · 1990 · 50 citations

Materials Engineering, Electrical Engineering, Engineering +10

Micro coils for an advanced system for measuring intraocular pressure

S. Ullerich, W. Mokwa, Gerd vom Bögel et al. · 1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology. Proceedings (Cat. No.00EX451) · 2000 · 22 citations

Medical Electronics, Engineering, Ophthalmology +13

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