Concepedia

Plasma enhanced chemical vapor deposition silicon oxynitride optimized for application in integrated optics

Kerstin Wörhoff, A. Driessen, P.V. Lambeck, L.T.H. Hilderink, Petrus W.C. Linders, Th.J.A. Popma

Sensors and Actuators A Physical · 1999 · 125 citations · 7 references

DOI

Concepts

References

7

The hydrogen content of plasma-deposited silicon nitride

W. A. Lanford, Myron J. Rand · Journal of Applied Physics · 1978 · 782 citations

, , +17

Silicon oxynitride planar waveguiding structures for application in optical communication

R.M. de Ridder, K. Warhoff, A. Driessen et al. · IEEE Journal of Selected Topics in Quantum Electronics · 1998 · 109 citations

, , +17

A normalized approach to the design of low-loss optical waveguide bends

M.K. Smit, E.C.M. Pennings, H. Blok · Journal of Lightwave Technology · 1993 · 83 citations · Full text

, , +15

Low-loss fiber-matched low-temperature PECVD waveguides with small-core dimensions for optical communication systems

Martin Hoffmann, P. Kopka, E. Voges · IEEE Photonics Technology Letters · 1997 · 54 citations

, , +17

Plasma-enhanced growth, composition, and refractive index of silicon oxy-nitride films

Kent E. Mattsson · Journal of Applied Physics · 1995 · 41 citations · Full text

, , +14