Concepedia

Publication | Closed Access

Plasma enhanced chemical vapor deposition silicon oxynitride optimized for application in integrated optics

DOI

125

Citations

7

References

1999

Year

Kerstin Wörhoff, A. Driessen, P.V. Lambeck, L.T.H. Hilderink, Petrus W.C. Linders, Th.J.A. Popma
Sensors and Actuators A Physical

References

YearCitations

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