IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems · 1986 · 50 citations · 6 references
EngineeringElectrical EngineeringManufacturing EngineeringManufacturing ProcessesMicroelectronicsUncertainty QuantificationDevice CharacterizationIntegrated Circuit FabricationParameter EstimationVariation AnalysisFormal VerificationMomentsParameter ExtractionPhysical Parameter EstimationProcess CharacterizationProcess Parameter IdentificationProcess Variation AnalysisStatistical Moments
It is well known that the integrated circuit (IC) manufacturing process is subject to inherent statistical fluctuations of material quality and equipment performance. Characterization of these fluctuations is important if the performance of an IC manufacturing facility is to be simulated and optimized. In this paper we present a general methodology for determining the statistical moments associated with a set of independently varying parameters, that are principally responsible for the fluctuations in the IC manufacturing process. This methodology has been implemented in a program called PROMETHEUS. A method for the formal statistical verification of the extracted moments is also presented.
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Introduction to linear and nonlinear programming
E. Polak · IEEE Transactions on Automatic Control · 1974 · 2.1K citations