IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems · 1982 · 77 citations · 17 references
EngineeringManufacturing EngineeringManufacturing ProcessesProcess DesignSimulation-based DesignDesign SimulationManufacturing SimulationProcess EngineeringProcess SimulationSimulation MethodsSimulation ModelingFabrication Process SimulationManufacturing Process SimulationManufacturing System SimulationManufacturing Variation ModelingProcess Variation AnalysisSimulation Of Manufacturing SystemsStatistical Simulation
Information about the random behavior of the IC manufacturing process can be applied for IC and process design tasks. In this paper a methodology for modeling random fluctuations of IC manufacturing process is proposed. A simulator of a complete bipolar manufacturing process called FABRICS, is described. A few applications illustrating advantages of the proposed statistical process modeling method are discussed.
17