Novel micromachined cantilever sensors for scanning near‐field optical microscopy

Abstract

The reproducible micromachining of hollow metal tips on Si cantilevers and their applicability to scanning near‐field optical microscopy (SNOM) is described. This sensor is fabricated using semiconductor compatible technologies. A hollow metal pyramid is employed as an optical aperture sensor for SNOM and simultaneously as a force sensor for scanning force microscopy applications. Apertures down to 120 nm were realized. To confirm the feasibility of the sensor we present measurements on microstructured chromium films as well as on hot filament chemical vapour deposition grown (111) diamond membranes. The SNOM images show a resolution of about 100 nm, demonstrating the usefulness of these probes.