Materials science forum · 1998 · 27 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceCeramic MaterialsElectronic MaterialsSemiconductor MaterialsConductive MaterialsDopingIon ImplantationSemiconductor Device MaterialsSemiconductor InterfacesSemiconductor PhysicsConductivityDoping Effects On Electrical PropertiesIn-situ DopingSemiconductor DopingSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon Doping