Vacuum · 1995 · 12 citations · 10 references
Natural SciencesMaterials EngineeringMaterials ScienceCondensed Matter PhysicsSurface ScienceThin FilmsChemical Vapor DepositionPhysical Vapor DepositionRadiation Damage In MaterialsSemiconductor Thin FilmsThin-film DepositionThin-film MaterialsChemical Vapor Deposition MaterialsFilm Growth MechanismsThin Oxide FilmsThin-film Growth MechanismsTransport In Thin FilmsVapour Diffusion
10
Synchrotron radiation induced chemical vapor deposition of thin films from metal hexacarbonyls*
Derrick C. Mancini, Shikha Varma, J. K. Simons et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 29 citations
Natural Sciences, Materials Engineering, Materials Science +17