A Scanning Force Microscope Combined with a Scanning Electron Microscope for Multidimensional Data Analysis

Abstract

A Scanning Force Microscope (SFM) intended for operation inside a Scanning Electron Microscope (SEM) is described. This combined instrument allows one to image a sample conventionally by SEM and to investigate by SFM the local topography as well as certain physical characteristics of the surface (friction, elasticity...) . The combination of the two microscopes is very attractive because they complement each other in terms of depth of field, lateral and vertical resolution, field of view, speed and ability to image insulating surfaces. A multidimensional data space relative to the same area of a sample surface can be constructed, which should help to give new insights into the nature of materials.