Computers & Structures · 2005 · 52 citations · 7 references
EngineeringElectrical EngineeringMechanical EngineeringActuatorsMicroelectromechanical SystemsMicrofabricationActuator DesignElectrostatic ActuationElectrostatic ActuatorsMems ActuatorsMems DesignMems ModelingActuation Voltage ReductionElectrostatic MicroactuatorsElectrostatic Microelectromechanical SystemsMicrobeam DesignModeling Of Electrostatic ActuatorsOptimal DesignPull-in Voltage
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Stabilization of electrostatically actuated mechanical devices
J.I. Seeger, S. B. Crary · 2002 · 182 citations