Sensors and Actuators A Physical · 1997 · 160 citations · 11 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationSensorsMems DesignMems SensorsMicroelectromechanical SensorsTemperature MeasurementTemperature SensorsThermal SensorsMems Thermal SensorsMicro-optomechanical SensorsThermal Characterization
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Formulas for Stress and Strain
Raymond J. Roark, W. C. Young, R. Plunkett · Journal of Applied Mechanics · 1976 · 1.9K citations · Full text
Natural Sciences, Materials Engineering, Materials Science +10
Short cantilevers for atomic force microscopy
D. A. Walters, J. P. Cleveland, Neil H. Thomson et al. · Review of Scientific Instruments · 1996 · 490 citations
Observation of a chemical reaction using a micromechanical sensor
James K. Gimzewski, Ch. Gerber, Ernst Meyer et al. · Chemical Physics Letters · 1994 · 468 citations
Mechanical detection of magnetic resonance
D. Rugar, C. S. Yannoni, John A. Sidles · Nature · 1992 · 395 citations