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Natural SciencesMaterials EngineeringMaterials ScienceSemiconductor MaterialsSurface ScienceThin FilmsCoatingsOxide SemiconductorsSemiconductor Thin FilmsSurface PassivationThin-film DepositionThin-film MaterialsBarrier Layer DepositionReactive SputteringSputter DepositionSputteringThin Oxide Layers
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Natural Sciences, Materials Engineering, Materials Science +17
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Characterisation of aluminium oxynitride gas barrier films
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Natural Sciences, Materials Engineering, Materials Science +12